Check the listing for details. New Aerotech Linear Stage Model ATS100, Surplus Clean Room Lab Equipment. Condition: New – Open box. Listed at 7250.00 USD. ATS100 Mechanical Bearing, Screw-Driven Linear StageThis new Aerotech ATS100 linear ball screw stage is surplus equipment originally purchased for use as a fourth axis in a microstepper research platform. Although it lacks its original packaging the stage was never installed or used in any way and has been sealed and stored in a class 100 clean room environment. The stage incorporates an Aerotech model ATS100-100-U-20P linear slide with a model BM75 drive. $10,000 USD new. This from Aerotech (Other spec's, CAD drawings and new item pricing quotes are also available from Aerotech): ATS100 stages provide excellent stiffness and long-term stability, thanks to a box-style design that features a precision-ground ballscrew and linear motion guide bearings. The compact design makes it easy to integrate ATS100 stages in confined spaces such as gantry bridges, machine enclosures and vacuum chambers. Driven by a selection of brushless rotary motors with integral feedback encoders, ATS100 stages will equip your process with smooth, ultra-precise motion performance. Plus, ATS100 stages contain features to protect against the effects of contamination, ensuring a long lifetime of highly reliable operation. Design FeaturesDelivers submicron positioning accuracy & bidirectional repeatability to 0.3 µmIntegrates easily thanks to low-profile, compact form factorProvides exceptional stiffness & stabilityProtects against contamination with integral bellows waycoverSupports travel lengths up to 200 mmAvailable in vacuum-compatible configurationsKey ApplicationsATS100 stages are ideal for a variety of precision industrial and laboratory applications, including:Measurement, inspection & microscopySemiconductor wafer testing & fabricationLaser microprocessingPrecision dispensingOptics manipulation & processingAdvanced manufacturing & precision micromachiningGantry Z-axis applicationsOutstanding Construction FeaturesATS100 series stages are machined from a special cast aluminum alloy to provide a high strength-to-weight ratio and long-term stability. The base is a box design that provides exceptional stiffness and stability.ATS100 series stages employ a precision-ground ball screw pre-loaded to eliminate backlash, and its nut has wipers to prevent contamination and maintain high accuracy throughout the life of the stage. High-quality, pre-loaded duplex bearings are used to eliminate axial play.All ATS100 series stages incorporate Linear Motion Guide (LMG) bearings to provide high load capability and high stiffness. The LMG design provides a compact stage with continuous carriage support over the entire travel and good cantilevered load capability. Integral wipers on the bearing trucks help ensure stage travel life. Highly accurate optical limit switches and end stops are also standard.Integral bellows-type waycovers protect the drive and bearing system from contamination. Metal surfaces are protected with an attractive clear anodized finish. Both metric (standard) and English mounting and bolt-hole patterns are available.High AccuracyThe ATS100 sets the standard for precision performance in a compact package. With the -PL2 option, the ATS100 is capable of submicron accuracy and an impressive repeatability of 0.3 µm.Motors and DrivesIncluded with the ATS100 series stages are Aerotech's BMS series brushless rotary motors. This motor has all of the advantages of a brushless motor – high acceleration, no brushes to wear and lower heating – yet has zero cogging for extremely smooth motion and accuracy. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.OptionsStandard options include a precision right-angle bracket for multi-axis assembly and vacuum preparation to 10-6 torr.mechanicalCOMPAREiATS100-050ATS100-100ATS100-150ATS100-200Travel50 mm100 mm150 mm200 mmMaximum Travel Speed(1)100 mm/sMaximum Load-Horizontal(2)25.0 kgMaximum Load-Vertical(2)10.0 kgMaximum Load-Side(2)10.0 kgAccuracy-Calibrated(3)±0.5 µm±0.75 µm±1.0 µmAccuracy-Standard±8 µm±9 µm±10 µmRepeatability (Bidirectional)-Calibrated(3)±0.3 µmRepeatability (Bidirectional)-Standard±0.7 µmStraightness and Flatness±1.0 µm±2.0 µm±3.0 µmPitch and Yaw5 arc sec8 arc sec10 arc sec12 arc secNominal Stage Weight-Less Motor1.6 kg1.8 kg1.9 kg2.1 kgNominal Stage Weight-With Motor2.7 kg2.9 kg3.0 kg3.2 kgConstructionAluminum Body/Stage and Table; Clear Anodize FinishNotes:Excessive duty cycle may impact stage accuracy.Payload specifications are for single axis systems and based on ball screw and bearing life of 2500 km (100 million inches) of travel.Available with Aerotech controllers.Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.